Operational aspects of a gallium phosphide source of P2vapor in molecular beam epitaxy
作者:
S. L. Wright,
H. Kroemer,
期刊:
Journal of Vacuum Science and Technology
(AIP Available online 1982)
卷期:
Volume 20,
issue 2
页码: 143-148
ISSN:0022-5355
年代: 1982
DOI:10.1116/1.571348
出版商: American Vacuum Society
关键词: GALLIUM PHOSPHIDES;MOLECULE BEAMS;EPITAXY;PHOSPHORUS;CRYSTAL GROWTH;VAPOR PRESSURE;SILICON;GALLIUM
数据来源: AIP
摘要:
We report our operational experiences with a gallium phosphide source of P2vapor in the MBE growth of GaP. The use of a P2source results in much more favorable vacuum characteristics than the use of P4, as generated by an elemental phosphorus source, introducing no complications compared to the growth of arsenides. The phosphorus background pressure during growth is actually lower than the background pressure present during GaAs growth using an elemental arsenic As4source, for comparable flux rates. The few P4molecules that do form by association of P2condense as white phosphorus on the cryobaffles and re‐evaporate upon warmup. However, the pressure peaks at a value no higher than the background pressure during growth. Furthermore, the bakeout pressures are not significantly higher than those obtained using arsenic only. The P2beam generated by the GaP source contains less Ga than one might expect from equilibrium vapor pressure considerations, thus greatly facilitating the independent control of Ga and P2fluxes.
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