Hot electron emission lithography
作者:
M. Poppeller,
E. Cartier,
R. M. Tromp,
期刊:
Applied Physics Letters
(AIP Available online 1998)
卷期:
Volume 73,
issue 19
页码: 2835-2837
ISSN:0003-6951
年代: 1998
DOI:10.1063/1.122606
出版商: AIP
数据来源: AIP
摘要:
We have developed an electron lithography method, hot electron emission lithography, which is capable of printing integrated circuits with an exposure time of only a few seconds. The basic design and fabrication of the patterned electron emitting mask made by standard metal–oxide–semiconductor technology will be discussed, and its applicability in a simple 1:1 e-beam stepper will be demonstrated. Patterns with a minimum feature size of 160 nm have been printed successfully. Further improvements in resolution to 50 nm appear to be possible. ©1998 American Institute of Physics.
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