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Charge exchange features of excited sputtered particle production

 

作者: V.E. Yurasova,   I.F. Urazgil'din,  

 

期刊: Radiation Effects and Defects in Solids  (Taylor Available online 1991)
卷期: Volume 117, issue 1-3  

页码: 99-111

 

ISSN:1042-0150

 

年代: 1991

 

DOI:10.1080/10420159108220600

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

The results are presented which have been obtained by studying the angular dependence of photon and ion emission and the spatial energy distribution of excited silicon ions produced under ion bombardment of monocrystalline and amorphized silicon surface. The experimental data are discussed which have been obtained mostly by the coincidence method. The theoretical concepts making it possible to account for the observed behavioural features are also discussed.

 

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