Fabrication of an InGaAs single quantum well circular ring laser by direct laser patterning
作者:
M. C. Shih,
M. H. Hu,
M. B. Freiler,
M. Levy,
R. Scarmozzino,
R. M. Osgood,
I. W. Tao,
W. I. Wang,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 66,
issue 20
页码: 2608-2610
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.113099
出版商: AIP
数据来源: AIP
摘要:
The fabrication of single quantum well (SQW) ridge waveguide ring laser in strained InGaAs is described which utilizes direct‐write laser lithography followed by cryogenic UV laser‐assisted etching. The laser has a threshold current of 270 mA and emits ∼14 mW of single‐frequency output. ©1995 American Institute of Physics.
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