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Novel method to fabricate corrugation for a &lgr;/4‐shifted distributed feedback laser using a grating photomask

 

作者: M. Okai,   S. Tsuji,   N. Chinone,   T. Harada,  

 

期刊: Applied Physics Letters  （AIP Available online 1989）
卷期: Volume 55, issue 5  

页码: 415-417

 

ISSN:0003-6951

 

年代: 1989

 

DOI:10.1063/1.101882

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A novel method was developed to fabricate corrugation for a &lgr;/4‐shifted distributed feedback (DFB) laser. Mechanically ruled grating patterns were transferred photolithographically to the surface of an InP substrate. The resultant &lgr;/4‐shifted DFB laser operated in a single longitudinal mode at the Bragg wavelength.

 

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