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Generation of electron cyclotron resonance plasmas using a circular TE01 mode microwave

 

作者: R. Hidaka,   N. Hirotsu,   N. Tanaka,   Y. Kawai,  

 

期刊: Journal of Applied Physics  （AIP Available online 1992）
卷期: Volume 72, issue 9  

页码: 4461-4462

 

ISSN:0021-8979

 

年代: 1992

 

DOI:10.1063/1.352187

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An electron cyclotron resonance plasma using a circular TE01 mode microwave is generated to achieve larger diameters. It is shown that the input power of the circular TE01 mode is efficiently consumed to generate electron cyclotron resonance plasmas. The density and temperature of electrons is around 1012cm−3and 3–5 eV at 5 kW input power, respectively.

 

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