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Preparation of YBa2Cu3O7−&dgr;thin films by magnetron sputtering withinsituplasma oxidation

 

作者: Senzu Yang,   Peiheng Wu,   Zhengming Ji,   Zhijian Sun,   Ruojian Zhang,   Yuan Li,   Shiyuan Zhang,   Hongchai Zhang,   Hanmo Liu,  

 

期刊: Journal of Applied Physics  （AIP Available online 1990）
卷期: Volume 68, issue 5  

页码: 2308-2310

 

ISSN:0021-8979

 

年代: 1990

 

DOI:10.1063/1.346536

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Superconducting YBa2Cu3O7−&dgr;thin films with surface roughness Ra∼20 A˚ have been successfully prepared by either rf or dc magnetron sputtering. The substrate temperature was kept at 600–670 °C during deposition and a subsequentinsituplasma oxidation treatment was performed at 480–520 °C. The films deposited on single‐crystal SrTiO3(100) exhibited zero resistance at 91 K and had the critical current density of 3×106A/cm2. In this paper we describe the influences of fabrication conditions on film superconductivity.

 

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