We are developing actuators and sensors using PZT thin film deposited with hydrothermal method. The merit of the hydrothermal method is thick film and applicable to complicated surface shape. A micro ultrasonic motor has been fabricated. The diameter and length of the stator transducer of the motor were 1.4 mm and 5 mm. The maximum output torque and no-load revolution speed were 0.67 μNm and 680 rpm. A touch probe sensor for measuring surface roughness has been fabricated. The sensor thickness and length were 0.12 mm and 9.8 mm. The resonance frequency and Q factor were 304 kHz and 705. The resolution of the sensor was estimated to 2.4 nm.