Aluminum‐oven emergency power supply for molecular‐beam epitaxy system

 

作者: L. Ungier,   J. R. Arthur,   H. M. Yoo,   T. G. Stoebe,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1992）
卷期: Volume 10, issue 3  

页码: 1226-1227

 

ISSN:1071-1023

 

年代: 1992

 

DOI:10.1116/1.585894

 

出版商: American Vacuum Society

 

关键词: MOLECULAR BEAM EPITAXY;POWER SUPPLIES;ALUMINIUM;OVENS;ELECTRONIC CIRCUITS;PERFORMANCE TESTING

 

数据来源: AIP

 

 

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