Mass spectrometric determination of the percent dissociation of a high-density chlorine plasma
作者:
G. A. Gaddy,
S. F. Webb,
Rik Blumenthal,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 71,
issue 22
页码: 3206-3208
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.120291
出版商: AIP
数据来源: AIP
摘要:
Recent computer modeling of high-density chlorine plasmas has indicated that the gas is highly dissociated. This important prediction has only been recently confirmed by optical measurements, which require either external or internal calibration. Unfortunately, these optical techniques cannot readily be applied to the more chemically complex multicomponent plasmas commonly used in real processing. Using a new mass spectrometric method capable of detecting the local concentrations of both atomic and molecular atomic species within a plasma, a percent molecular dissociation of>85&percent;has been measured in an electron cyclotron resonance chlorine plasma at low pressures. ©1997 American Institute of Physics.
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