Microfabrication of a mechanically controllable break junction in silicon
作者:
C. Zhou,
C. J. Muller,
M. R. Deshpande,
J. W. Sleight,
M. A. Reed,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 67,
issue 8
页码: 1160-1162
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.114994
出版商: AIP
数据来源: AIP
摘要:
We present a detailed description of the fabrication and operation at room temperature of a novel type of tunnel displacement transducer. Instead of a feedback system it relies on a large reduction factor assuring an inherently stable device. Stability measurements in the tunnel regime infer an electrode stability within 3 pm in a 1 kHz bandwidth. In the contact regime the conductance takes on a discrete number of values when the constriction is reduced atom by atom. This reflects the conduction through discrete channels. ©1995 American Institute of Physics.
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