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Ultrahigh vacuum scanning force microscope with fiber‐optic deflection sensor

 

作者: B. Kracke,   B. Damaschke,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1996)
卷期: Volume 67, issue 8  

页码: 2957-2959

 

ISSN:0034-6748

 

年代: 1996

 

DOI:10.1063/1.1147079

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We built a scanning force microscope working in ultrahigh vacuum. The lever deflection is measured by a fiber‐optic interferometer. To detect large lever deflections the distance between the fiber end and the cantilever backside is controllable by a piezoelectric device. With this technique force–distance curves can be acquired even over large distances. We implemented a stepper motor with gear reduction system for coarse approach in our microscope. First measurements of thin gold films grown on mica obtainedinsituat 10−8Pa are presented. ©1996 American Institute of Physics.

 

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