Ultrahigh vacuum scanning force microscope with fiber‐optic deflection sensor
作者:
B. Kracke,
B. Damaschke,
期刊:
Review of Scientific Instruments
(AIP Available online 1996)
卷期:
Volume 67,
issue 8
页码: 2957-2959
ISSN:0034-6748
年代: 1996
DOI:10.1063/1.1147079
出版商: AIP
数据来源: AIP
摘要:
We built a scanning force microscope working in ultrahigh vacuum. The lever deflection is measured by a fiber‐optic interferometer. To detect large lever deflections the distance between the fiber end and the cantilever backside is controllable by a piezoelectric device. With this technique force–distance curves can be acquired even over large distances. We implemented a stepper motor with gear reduction system for coarse approach in our microscope. First measurements of thin gold films grown on mica obtainedinsituat 10−8Pa are presented. ©1996 American Institute of Physics.
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