Using methyl methacrylate as an intermediate, an attempt was made to obtain a high‐resolution two‐step replica, by improving evaporation elements and evaporation method. It was found that, by using Zr, Si, and Fe, with Ge and Cr as evaporation elements, the resolution of two‐step replicas was superior to that obtained up to the present. It is also known that the resolution of replicas obtained by performing metallic evaporation after treatment by ion or electron bombardment for a methyl methacrylate intermediate replica is superior to that without bombardment. Two evaporation methods—the usual continuous method and an intermittent one—were compared. A new method for the production of surface replicas of microspecimens is also proposed. The high‐resolution replica obtained here is compared with others along with a brief consideration of the results obtained.