Optical beam‐deflection scanning force microscope with easy cantilever‐laser beam alignment

 

作者: Kazuyoshi Sugihara,   Akira Sakai,   Tetsuo Matsuda,   Masao Toyosaki,   Kuniyoshi Tanaka,   Akira Matsuura,   Shirou Tsukada,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1994）
卷期: Volume 12, issue 2  

页码: 620-621

 

ISSN:1071-1023

 

年代: 1994

 

DOI:10.1116/1.587400

 

出版商: American Vacuum Society

 

关键词: SPATIAL RESOLUTION;SCANNING LIGHT MICROSCOPY;ALIGNMENT;LASER BEAM APPLICATIONS;IMAGES

 

数据来源: AIP

 

 

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