A comparison of experimental and theoretical electron energy distribution functions in the driver of a multicusp ion source
作者:
J. Bretagne,
W. G. Graham,
M. B. Hopkins,
期刊:
AIP Conference Proceedings
(AIP Available online 1990)
卷期:
Volume 210,
issue 1
页码: 129-134
ISSN:0094-243X
年代: 1990
DOI:10.1063/1.39605
出版商: AIP
数据来源: AIP
摘要:
Experimental and theoretical electron energy distribution functions (EEDF) measured and calculated for the driver of a multicusp ion source operating in hydrogen are compared. The results indicate that atomic physics based theoretical models can accurately predict the EEDF in such discharges if some appropriate experimentally determined quantities are used as input parameters. The magnitude and shape of the EEDF is found to be particularly sensitive to the effective surface to volume ratio for electrons.
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