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A comparison of experimental and theoretical electron energy distribution functions in the driver of a multicusp ion source

 

作者: J. Bretagne,   W. G. Graham,   M. B. Hopkins,  

 

期刊: AIP Conference Proceedings  (AIP Available online 1990)
卷期: Volume 210, issue 1  

页码: 129-134

 

ISSN:0094-243X

 

年代: 1990

 

DOI:10.1063/1.39605

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Experimental and theoretical electron energy distribution functions (EEDF) measured and calculated for the driver of a multicusp ion source operating in hydrogen are compared. The results indicate that atomic physics based theoretical models can accurately predict the EEDF in such discharges if some appropriate experimentally determined quantities are used as input parameters. The magnitude and shape of the EEDF is found to be particularly sensitive to the effective surface to volume ratio for electrons.

 

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