Buried‐heterostructure lasers fabricated byinsituprocessing techniques
作者:
Y. L. Wang,
H. Temkin,
L. R. Harriott,
R. A. Logan,
T. Tanbun‐Ek,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 57,
issue 18
页码: 1864-1866
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.104042
出版商: AIP
数据来源: AIP
摘要:
We describe, for the first time, the preparation of InGaAs/InP homojunction confined buried‐heterostructure lasers by high vacuum processing techniques. Lithography and waveguide mesa etching were carried out using ultrathin native oxide masking, focused Ga ion beam writing, and free Cl2etching. Base laser structures and overgrowth were carried out by atmospheric pressure metalorganic vapor phase epitaxy. The resulting lasers have low‐threshold currents of ∼62 mA.
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