Positive working resists sensitive to visible light, I: poly(tert‐butyl and 2‐phenylpropyl‐2 methacrylates) sensitized with diphenyliodonium salt —p‐aminobenzylidene dye system
作者:
Yasushi Ohe,
Kunihiro Ichimura,
期刊:
Polymers for Advanced Technologies
(WILEY Available online 1992)
卷期:
Volume 3,
issue 1
页码: 9-16
ISSN:1042-7147
年代: 1992
DOI:10.1002/pat.1992.220030102
出版商: John Wiley&Sons, Ltd.
关键词: Iodonium salt;Sensitized photolysis;Photogenerated acid;Poly(methacrylates)
数据来源: WILEY
摘要:
AbstractVisible‐light‐sensitive positive type resists have been developed. The chemistry to form images is based on the cleavage of side chain ester bonds of poly(methacrylates) catalyzed by an acid which is generated on sensitized photodecomposition of a diphenyliodonium (DPI) salt. Homopolymers and copolymers of tert‐butyl methacrylate (BMA) and 2‐phenylpropyl‐2 methacrylate (PPMA) were used as acid labile polymers. Exposure of thin films of the poly(methacrylates) containing DPI salt and p‐dimethylaminobenzylidene derivatives to an Ar laser beam emitting 488 nm light and subsequent heat treatment resulted in solubility alteration of the polymers, which became soluble in a protic solvent system. Considerable reduction of film thickness was observed after heating an image‐wise exposed thin film of PPMA polymers. The minimum exposure energies of 488 nm light for the positive image formation were 60 mJ/cm2and 40 mJ/cm2for BMA and PPMA homopolymers,
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