Highly conductive and wide optical band gapn‐type &mgr;c‐SiC prepared by electron cyclotron resonance plasma‐enhanced chemical vapor deposition
作者:
Toshiro Futagi,
Masakazu Katsuno,
Noboru Ohtani,
Yasumitsu Ohta,
Hidenori Mimura,
Kazuhiko Kawamura,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 58,
issue 25
页码: 2948-2950
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.104731
出版商: AIP
数据来源: AIP
摘要:
We have investigated the gas pressure dependence of electron cyclotron resonance (ECR) plasma‐enhanced chemical vapor deposition (PECVD) and preparedn‐type &mgr;c‐SiC:H with wide optical band gap (2.1–2.5 eV) and high dark conductivity (10−3– 1 S/cm). It has been suggested from plasma diagnoses of the ECR plasma that at low gas pressure a strong etching effect of hydrogen radicals and/or ions dominates the film growth process and the hydrogen ions impinging on the growing surface make the formation of &mgr;c‐SiC:H difficult, and that at high gas pressure, for the formation of &mgr;c‐SiC:H, there are nonemissive radicals contributing to the surface coverage or a nucleus formation mechanism which has not been taken into consideration in conventional rf‐PECVD.
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