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Mass spectroscopic study of CH3radicals produced in a hollow cathode discharge cell

 

作者: M. M. Sanz,   L. Abad,   V. J. Herrero,   I. Tanarro,  

 

期刊: Journal of Applied Physics  (AIP Available online 1992)
卷期: Volume 71, issue 11  

页码: 5372-5375

 

ISSN:0021-8979

 

年代: 1992

 

DOI:10.1063/1.350556

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Neutral CH3radicals in a hollow cathode discharge cell containing methane have been detected with a quadrupole mass spectrometer, using the threshold ionization technique. With the experimental conditions employed in this work the measured efficiency in CH3production has been 0.2%, which is higher than that shown for other types of discharges in the bibliography. On the other hand a high depletion of the CH4density has been observed and the mass spectrum of the discharge shows the appearance of compounds atm=25, 26, and 27, proceeding from recombination processes.

 

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