Processing Effects in the Sol–Gel Preparation of PZT Dried Gels, Powders, and Ferroelectric Thin Layers
作者:
Charles D. E. Lakeman,
David A. Payne,
期刊:
Journal of the American Ceramic Society
(WILEY Available online 1992)
卷期:
Volume 75,
issue 11
页码: 3091-3096
ISSN:0002-7820
年代: 1992
DOI:10.1111/j.1151-2916.1992.tb04392.x
出版商: Blackwell Publishing Ltd
数据来源: WILEY
摘要:
Infrared spectroscopy was used to monitor and characterize solutions used in the preparation of PZT 53/47 powders, dried gels, and thin layers deposited on platinized silicon substrates. It was found that careful control of the chemistry of the precursor solutions, in particular the control of the formation of esters and their elimination, resulted in reproducible solutions which could be used to prepare thin layers with superior properties. In addition, it was found that phase development and microstructure were related to the precursor chemistry. Single‐phase perovskite layers with uniform microstructures resulted from ester‐free solutions and were suitable for ferroelectric applications (Pr∼ 22 μC/cm2,Ec∼ 80 kV/cm,K∼ 800, ta
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