Molecular‐beam epitaxy (MBE) of In1−xGaxAs and GaSb1−yAsy
作者:
Chin‐An Chang,
R. Ludeke,
L. L. Chang,
L. Esaki,
期刊:
Applied Physics Letters
(AIP Available online 1977)
卷期:
Volume 31,
issue 11
页码: 759-761
ISSN:0003-6951
年代: 1977
DOI:10.1063/1.89538
出版商: AIP
数据来源: AIP
摘要:
Films of In1−xGaxAs and GaSb1−yAsyover the entire composition ranges have been grown on (100) GaAs, InAs, and GaSb substrates by MBE.Insituobservations by high‐energy electron diffraction have revealed a variety of surface reconstructions and correlated the growth process with the lattice mismatch. The compositions are governed by the relative rates of In and Ga in In1−xGaxAs, but primarily by that of Sb in GaSb1−yAsybecause of its dominant incorporation over As. In these alloys, Sn is found to be a donor throughout In1−xGaxAs but an amphoteric impurity in GaSb1−yAsy.
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