This paper deals with microgeometrically-determined cavitation in oscillating slider bearings. After explaining the difference in the origin of cavitation in journal and linear bearings, the theoretical idea of a computer simulation program on the basis of a combined microhydrodynamic/solid-solid-contact approach is introduced. With the help of this program, slider surface geometry, inertia effects, lubricant properties, normal load, and lubricant film temperatures were found as parameters of microcavitation.