首页   按字顺浏览 期刊浏览 卷期浏览 CRYSTALLOGRAPHIC SYMMETRY OF SURFACE STATE DENSITY IN THERMALLY OXIDIZED SILICON
CRYSTALLOGRAPHIC SYMMETRY OF SURFACE STATE DENSITY IN THERMALLY OXIDIZED SILICON

 

作者: Emil Arnold,   Joshua Ladell,   Gerald Abowitz,  

 

期刊: Applied Physics Letters  (AIP Available online 1968)
卷期: Volume 13, issue 12  

页码: 413-416

 

ISSN:0003-6951

 

年代: 1968

 

DOI:10.1063/1.1652496

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The detailed dependence of surface state density on crystallographic orientation was determined by measuring the ac metal‐oxide‐semiconductor conductance on the surface of a thermally oxidized single‐crystal silicon hemisphere. It was found that the ⟨111⟩ poles are located at maxima, the ⟨100⟩ poles at minima, and the ⟨110⟩ poles at saddle points in the surface state density distribution. The symmetry of the surface state density distribution is generally similar to that of the ``fixed'' interface charge density, but differences are noted in the vicinity of the ⟨100⟩ directions.

 

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