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Aluminum Antimonide Thin Films by Coevaporation of the Elements

 

作者: J. E. Johnson,  

 

期刊: Journal of Applied Physics  (AIP Available online 1965)
卷期: Volume 36, issue 10  

页码: 3193-3195

 

ISSN:0021-8979

 

年代: 1965

 

DOI:10.1063/1.1702949

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Stoichiometric thin films of AlSb have been prepared by coevaporation of the elements onto glass substrates held at 550°C. Conductance activation energies of 0.17 and 0.29 eV were observed. Oxygen adsorption causes a level at 0.24 eV that dominates the conductance in air at room temperature. Space‐charge‐limited current flow was observed at room‐ and liquid‐nitrogen temperatures. The hole concentration and mobility in the layers are estimated at 1015cm−3and 1.5 cm2/V‐sec, respectively.

 

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