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Laser cleaning: Laser‐induced removal of particles from surfaces

 

作者: W. Zapka,   W. Ziemlich,   W. P. Leung,   A. C. Tam,  

 

期刊: Advanced Materials for Optics and Electronics  （WILEY Available online 1993）
卷期: Volume 2, issue 1‐2  

页码: 63-70

 

ISSN:1057-9257

 

年代: 1993

 

DOI:10.1002/amo.860020108

 

出版商: John Wiley&Sons Ltd.

 

关键词: Particulate;Contamination;Laser‐induced removal;Particle removal;Laser cleaning

 

数据来源: WILEY

 

摘要:

AbstractPulsed‐laser‐induced removal of particles from surfaces is a new cleaning technique. This laser cleaning can be performed on dry surfaces as well as on wet surfaces with a micron‐thick liquid film during pulsed laser irradiation to provide enhanced removal efficiency. Using the latter technique, to be called ‘steam laser cleaning’ here, we are able to remove epoxy, alumina, silicon or gold particles with diameters in the range 0.1–10 μm from silicon and ot

 

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