Gallium nitride whiskers formed by selective photoenhanced wet etching of dislocations
作者:
C. Youtsey,
L. T. Romano,
I. Adesida,
期刊:
Applied Physics Letters
(AIP Available online 1998)
卷期:
Volume 73,
issue 6
页码: 797-799
ISSN:0003-6951
年代: 1998
DOI:10.1063/1.122005
出版商: AIP
数据来源: AIP
摘要:
Gallium nitride is used to fabricate high brightness blue and green light-emitting diodes in spite of high densities of extended structural defects. We describe a photoelectrochemical etching process that reveals the dislocation microstructure ofn-type GaN films by selectively removing material between dislocations. The GaN whiskers formed by the etching have diameters between 10 and 50 nm and lengths of up to 1 &mgr;m. A correlation between the etched features and threading dislocations in the unetched film is confirmed through transmission electron microscopy studies. The whisker formation is believed to be indicative of electrical activity at dislocations in GaN. ©1998 American Institute of Physics.
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