DOPANT DEPENDENCY OF FERMI LEVEL LOCATION IN HEAVILY DOPED SILICON
作者:
T. F. Tao,
Yukun Hsia,
期刊:
Applied Physics Letters
(AIP Available online 1968)
卷期:
Volume 13,
issue 9
页码: 291-292
ISSN:0003-6951
年代: 1968
DOI:10.1063/1.1652617
出版商: AIP
数据来源: AIP
摘要:
Results obtained from the study of the incremental conductance of metal to heavily dopedn‐type Si barrier tunneling as a function of bias voltage are presented. The Si is variously doped with P, As, and Sb. Experimental data indicate that the location of Fermi level is strongly dependent on dopant types.
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