Fabrication of GaAs fine stripe structures by selective metalorganic chemical vapor deposition using diethylgalliumchloride
作者:
Ko‐ichi Yamaguchi,
Kotaro Okamoto,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 59,
issue 27
页码: 3580-3582
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.105638
出版商: AIP
数据来源: AIP
摘要:
Selective GaAs fine stripe structures, aligned along 〈011〉 direction, were grown by atmospheric‐pressure metalorganic chemical vapor deposition using diethylgalliumchloride. The width of the (100) top surface of the triangle‐shaped selective epilayers could be changed from 0 to 25 nm by controlling the growth temperature, and was independent of the growth time. This phenomena can be explained by reevaporation enhancement effect of reactant species containing chloride and two‐dimensional nucleation.
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