The electrical properties of metal contact Au and Ti onp‐type HgCdTe
作者:
G. Bahir,
R. Adar,
R. Fastow,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1991)
卷期:
Volume 9,
issue 2
页码: 266-272
ISSN:1071-1023
年代: 1991
DOI:10.1116/1.585605
出版商: American Vacuum Society
关键词: PHOTODIODES;FABRICATION;SCHOTTKY BARRIER DIODES;BARRIER HEIGHT;CHARGE TRANSPORT;GOLD;TITANIUM;AUGER ELECTRON SPECTROSCOPY;INTERFACE STATES;Au;Ti
数据来源: AIP
摘要:
Schottky barrier photodiodes have been fabricated onp‐type Hg1−xCdxTe, compositionx=0.22 and carrier concentration from 6×1015to 5×1016cm−3, with Au and Ti as contact metals. It has been found that Au barrier height is lower than that of Ti for all carrier concentrations. Low temperature annealing, 75 °C for 24 h, reduces the effective Au barrier height and raises the Ti barrier height. The electrical results are correlated with Auger depth profiling of the difference interfaces, and transport mechanisms are proposed.
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