Rastered laser light scattering studies during plasma processing: Particle contamination trapping phenomena
作者:
Gary S. Selwyn,
John E. Heidenreich,
Kurt L. Haller,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1991)
卷期:
Volume 9,
issue 5
页码: 2817-2824
ISSN:0734-2101
年代: 1991
DOI:10.1116/1.577207
出版商: American Vacuum Society
关键词: LIGHT SCATTERING;TRAPPING;PLASMA DIAGNOSTICS;LASER RADIATION;MICROELECTRONICS;CONTAMINATION;PARTICLES;WAFERS;PLASMA;IMPURITIES
数据来源: AIP
摘要:
The distribution and transport of particles in materials processing plasmas has been studied with a rastered laser light scattering technique. Contrary to expectation, the distribution of particles in a plasma processing tool is rarely random. Instead, structured clouds of particles form at the plasma/sheath boundary. The effect is attributed to trapping of the particles by weak electric field nonuniformities and the characteristic negative charge of isolated particles in a plasma. Field nonuniformities appear to be influenced by the topography and material design of the tool. For example, the presence of a Si wafer often induces significant particle trapping. Examples of particle trapping in a laboratory system are given, and similar phenomena are also verified in a manufacturing sputter deposition tool operating in a class 100 cleanroom. The implications of particle trapping in plasma processing are discussed.
点击下载:
PDF
(908KB)
返 回