Modelling strain distributions in ion‐implanted magnetic bubble materials
作者:
B. E. MacNeal,
V. S. Speriosu,
期刊:
Journal of Applied Physics
(AIP Available online 1981)
卷期:
Volume 52,
issue 6
页码: 3935-3940
ISSN:0021-8979
年代: 1981
DOI:10.1063/1.329198
出版商: AIP
数据来源: AIP
摘要:
The detailed properties of strain distributions in Ne+, B+, and He+implanted magnetic bubble garnet materials are accounted for by calculating the nuclear energy loss as a function of depth. The calculation is based on stopped ion distributions for ZnS, with suitable corrections made for differences in material density. The constant of proportionalityKbetween strain and nuclear energy loss, and the density ratiolare determined for each ion by comparing calculated strain distributions with experimental results obtained previously using an x‐ray diffraction technique. It is found thatKis roughly the same for all three ions, 0.016±0.003 (eV/A˚3)−1, and that the average valuel= 0.79±0.08 is consistent with the actual density ratiol= 0.72. Good agreement is found in additional examples of both single and multiple implants (±10% relative error). Finally, a procedure for selecting the incident energies and dosages required to produce a uniformly strained layer for bubble device applications is described, and then demonstrated by achieving a 0.4‐um‐thick layer with (1.07±0.09)% strain, using a double B+implant.
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