Optimizing the conductance of right‐angle valves
作者:
M. H. Hablanian,
F. J. Nuzzi,
T. L. Pflanz,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1991)
卷期:
Volume 9,
issue 3
页码: 2062-2065
ISSN:0734-2101
年代: 1991
DOI:10.1116/1.577413
出版商: American Vacuum Society
关键词: VACUUM SYSTEMS;VALVES;DESIGN;GAS FLOW;OPTIMIZATION;TESTING
数据来源: AIP
摘要:
The design of a valve to some degree is dictated by the size of the required connections. But the internal geometry, which establishes the conductance of the valve, should be based on the three‐dimensional examination of overall conductance. Following published Monte Carlo calculations, the internal designs of small right‐angle valves have been optimized by choosing the right combinations of the seat diameter, internal body diameter, and the length of the stroke. Using this approach, in the case of electromechanically operated valves, the expensive bellows (for compensating the force of the sealing spring) can be entirely eliminated. Comparative experimental verification for the optimal design are presented.
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