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Large volume, high density rf inductively coupled plasma

 

作者: R. W. Boswell,   R. K. Porteous,  

 

期刊: Applied Physics Letters  （AIP Available online 1987）
卷期: Volume 50, issue 17  

页码: 1130-1132

 

ISSN:0003-6951

 

年代: 1987

 

DOI:10.1063/1.98257

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Magnetized argon plasma columns with peak densities of greater than 1018m−3, lengths of 2 m, and full width half‐maximum diameters of 0.3 m have been created at pressures of 40 mPa (3×10−4Torr) with input powers of 1.5 kW of 7 MHz rf.

 

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