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Investigation of growth mode behavior and surface morphology evolution of metalorganic vapor phase epitaxy grown ZnTe layers on (001) GaAs

 

作者: M. Longo,   N. Lovergine,   A. M. Mancini,   G. Leo,   M. Berti,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1998)
卷期: Volume 16, issue 5  

页码: 2650-2655

 

ISSN:1071-1023

 

年代: 1998

 

DOI:10.1116/1.590250

 

出版商: American Vacuum Society

 

关键词: ZnTe

 

数据来源: AIP

 

摘要:

A systematic investigation on the mechanisms of nucleation and surface morphology evolution was performed on ZnTe epilayers, deposited on chemically etched GaAs(001) by metalorganic vapor phase epitaxy. A 2D–3D growth mode transition was observed at around two ZnTe equivalent monolyers (ML), which was ascribed to a Stransky–Krastanow growth mode. The 3D growth behavior was correlated to the development of{n11}-type planes, leading to a surface ridging effect along the [11̄0] direction for 4000-ML-thick ZnTe epilayers. The use of a solid-on- solid kinetic roughening model allowed the identification of a mechanism that limits the self- organization of ZnTe nanosized islands, namely, the high density of kink sites found in non- atomically flat GaAs substrates.

 

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