A metrological constant force stylus profiler
作者:
L. P. Howard,
S. T. Smith,
期刊:
Review of Scientific Instruments
(AIP Available online 1994)
卷期:
Volume 65,
issue 4
页码: 892-902
ISSN:0034-6748
年代: 1994
DOI:10.1063/1.1144918
出版商: AIP
数据来源: AIP
摘要:
A second‐generation constant force profiler is described combining a capacitance based stylus force probe with interferometric optical metrology to monitor position of the specimen carriage. The probe has a vertical range of 15 &mgr;m with a resolution of 0.23 nm and a flat bandwidth response with a −3 dB cutoff at 228 Hz. Passing the output signal through a single pole 200 Hz low‐pass filter, an overall system peak‐to‐peak broadband noise of less than 5 nm is observed. Manufactured primarily from inexpensive materials, the instrument demonstrates a stability of around 1 nm min−1under controlled laboratory conditions. Using an inexpensive motor/gearbox/micrometer open‐loop drive with velocity variations of up to 20%, profiles showing nanometer repeatability over 15 mm traces are demonstrated. Also shown is a profile of a soft contact lens in the hydrated state. The effect of the contact stiffness on the stylus probe/specimen interaction is illustrated by examining the dynamics of the force probe system while operating in the repulsive mode.
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