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A metrological constant force stylus profiler

 

作者: L. P. Howard,   S. T. Smith,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1994)
卷期: Volume 65, issue 4  

页码: 892-902

 

ISSN:0034-6748

 

年代: 1994

 

DOI:10.1063/1.1144918

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A second‐generation constant force profiler is described combining a capacitance based stylus force probe with interferometric optical metrology to monitor position of the specimen carriage. The probe has a vertical range of 15 &mgr;m with a resolution of 0.23 nm and a flat bandwidth response with a −3 dB cutoff at 228 Hz. Passing the output signal through a single pole 200 Hz low‐pass filter, an overall system peak‐to‐peak broadband noise of less than 5 nm is observed. Manufactured primarily from inexpensive materials, the instrument demonstrates a stability of around 1 nm min−1under controlled laboratory conditions. Using an inexpensive motor/gearbox/micrometer open‐loop drive with velocity variations of up to 20%, profiles showing nanometer repeatability over 15 mm traces are demonstrated. Also shown is a profile of a soft contact lens in the hydrated state. The effect of the contact stiffness on the stylus probe/specimen interaction is illustrated by examining the dynamics of the force probe system while operating in the repulsive mode.

 

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