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Activation energy for electromigration failure in Al–Cu conductor stripes covered with polyimide

 

作者: J. R. Lloyd,   R. N. Steagall,  

 

期刊: Journal of Applied Physics  (AIP Available online 1986)
卷期: Volume 60, issue 3  

页码: 1235-1237

 

ISSN:0021-8979

 

年代: 1986

 

DOI:10.1063/1.337325

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The activation energy for electromigration failure was determined for Al‐4% Cu conductor stripes covered with polyimide. The activation energy was measured to be 0.88 eV, which is substantially higher than that measured previously for similar systems under glass. The difference in the activation energies is attributed to the possible presence of hydrogen in the Al–Cu grain boundaries.

 

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