A reflectance anisotropy spectrometer for real‐time measurements
作者:
O. Acher,
B. Dre´villon,
期刊:
Review of Scientific Instruments
(AIP Available online 1992)
卷期:
Volume 63,
issue 11
页码: 5332-5339
ISSN:0034-6748
年代: 1992
DOI:10.1063/1.1143398
出版商: AIP
数据来源: AIP
摘要:
A new reflectance anisotropy (RA) spectrometer, in the 0.23–0.83‐&mgr;m range, is presented. The numerous similarities with phase‐modulated ellipsometry (PME) are emphasized. In particular, the RA spectrometer takes advantage of the high‐frequency modulation (50 kHz) provided by a photoelastic modulator. The use of optical fibers in both optical arms allows an increase of the compactness of the spectrometer. Four detectors can be used simultaneously providing the real‐time spectroscopic capability. The numerical data acquisition system of the detected signal is based on the use of a high precision analog‐digital converter and a fast Fourier transform processor. However, as compared to ellipsometry, RA can be only sensitive to the crystal surface. The adaptation of RA to a III‐V growth reactor by metalorganic chemical vapor deposition is described in detail. The high sensitivity of the RA spectrometer is emphasized. In particular real‐time variations of the RA signal ranging from 10−4to 10−3are reported. Then, the various RA techniques are compared. In particular, it is shown that this RA spectrometer allows the determination of both the real and the imaginary part of the signal. Finally the origin of the RA signal is discussed.
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