Effects of insulator surface roughness on Al‐alloy film properties and electromigration performance in Al‐alloy/Ti insulator layered interconnects
作者:
Hiroshi Onoda,
Tadashi Narita,
Kenshin Touchi,
Keiichi Hashimoto,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1996)
卷期:
Volume 14,
issue 4
页码: 2645-2655
ISSN:1071-1023
年代: 1996
DOI:10.1116/1.588999
出版商: American Vacuum Society
关键词: INTEGRATED CIRCUITS;ALUMINIUM;TITANIUM;SILICON OXIDES;ROUGHNESS;ELECTROPHORESIS;Al;Ti;SiO2
数据来源: AIP
摘要:
Effects of insulator surface roughness on the overlying aluminum alloy film properties and electromigration performance in Al alloy/Ti insulator layered interconnects have been investigated. Insulator surface roughness changes the roughness and crystallographic orientation of Al/Ti layered films formed on the insulator. In particular, the effect is prominent in the case of high‐temperature sputtering of Al alloy films. A rough insulator surface deteriorates the roughness and crystallographic orientation of the Al alloy film formed on the insulator, while a smooth insulator surface improves those properties. The insulator surface roughness does not change the roughness and crystallographic orientation of the Al alloy film without a Ti underlayer. Ti roughness and crystallographic orientation are improved on a very smooth surface insulator resulting in improvement in the roughness and crystallographic orientation of the Al alloy film formed on the Ti layer. As a result, the electromigration performance in Al/Ti layered interconnects changes according to the underlayer insulator surface roughness.
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