Liquid phase epitaxial growth of (AlzGa1−z)xIn1−xAsyP1−ypentanary on (100)GaAs substrate using a two‐phase solution technique
作者:
Hideo Kawanishi,
Takeshi Suzuki,
期刊:
Applied Physics Letters
(AIP Available online 1984)
卷期:
Volume 45,
issue 5
页码: 560-562
ISSN:0003-6951
年代: 1984
DOI:10.1063/1.95321
出版商: AIP
数据来源: AIP
摘要:
Liquid phase epitaxy of (AlzGa1−z)xIn1−xAsyP1−ypentanary is reported for the first time. The pentanary of (Al0.05Ga0.95)0.55In0.45As0.07P0.93is grown successfully on a (100) oriented GaAs substrate by liquid phase epitaxy using a two‐phase solution growth technique atTg=845 °C. Existence of Al in the epitaxial layer is determined by x‐ray microanalyzer, x‐ray diffractometer, and photoluminescence. The growth conditions of the (AlGa)InAsP pentanary are also discussed.
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