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Liquid phase epitaxial growth of (AlzGa1−z)xIn1−xAsyP1−ypentanary on (100)GaAs substrate using a two‐phase solution technique

 

作者: Hideo Kawanishi,   Takeshi Suzuki,  

 

期刊: Applied Physics Letters  (AIP Available online 1984)
卷期: Volume 45, issue 5  

页码: 560-562

 

ISSN:0003-6951

 

年代: 1984

 

DOI:10.1063/1.95321

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Liquid phase epitaxy of (AlzGa1−z)xIn1−xAsyP1−ypentanary is reported for the first time. The pentanary of (Al0.05Ga0.95)0.55In0.45As0.07P0.93is grown successfully on a (100) oriented GaAs substrate by liquid phase epitaxy using a two‐phase solution growth technique atTg=845 °C. Existence of Al in the epitaxial layer is determined by x‐ray microanalyzer, x‐ray diffractometer, and photoluminescence. The growth conditions of the (AlGa)InAsP pentanary are also discussed.

 

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