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The suppression of misfit dislocation introduction in heavily carbon doped GaAs

 

作者: S. P. Westwater,   T. J. Bullough,   T. B. Joyce,   B. R. Davidson,   L. Hart,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 70, issue 1  

页码: 60-62

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.119306

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The relaxation of heavily carbon doped GaAs, grown on (001) GaAs substrates was investigated using transmission electron microscopy and x-ray diffraction. Misfit dislocation introduction occurred only significantly above Matthews and Blakeslee’s critical thickness, with the onset of relaxation being delayed as the C concentration was increased. The resultant strain relaxation was highly anisotropic with the introduction of As-cored misfit dislocations being totally suppressed at the highest C levels, resulting in cracking of the epilayer. Locking of As-cored partial dislocations and a reduction in misfit dislocation velocity is proposed as the cause of the anisotropy and lack of relaxation. ©1997 American Institute of Physics.

 

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