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Van der Waals bonding of GaAs epitaxial liftoff films onto arbitrary substrates

 

作者: E. Yablonovitch,   D. M. Hwang,   T. J. Gmitter,   L. T. Florez,   J. P. Harbison,  

 

期刊: Applied Physics Letters  (AIP Available online 1990)
卷期: Volume 56, issue 24  

页码: 2419-2421

 

ISSN:0003-6951

 

年代: 1990

 

DOI:10.1063/1.102896

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Epitaxial liftoff is an alternative to lattice‐mismatched heteroepitaxial growth. Multilayer AlxGa1−xAs epitaxial films are separated from their growth substrates by undercutting an AlAs release layer in HF acid (selectivity ≳108forx≤0.4). The resulting AlxGa1−xAs films tend to bond by natural intermolecular surface forces to any smooth substrate (Van der Waals bonding). We have demonstrated GaAs thin‐film bonding by surface tension forces onto Si, glass, sapphire, LiNbO3, InP, and diamond substrates, as well as self‐bonding onto GaAs substrates. In transmission electron microscopy the substrate and thin‐film atomic lattices can be simultaneously imaged, showing only a thin (20–100 A˚) amorphous layer in between.

 

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