A new method for the simultaneous condensation of complete ternary alloy systems under ultrahigh vacuum conditions
作者:
A. Mehrtens,
M. Moske,
K. Samwer,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1988)
卷期:
Volume 6,
issue 6
页码: 3055-3061
ISSN:0734-2101
年代: 1988
DOI:10.1116/1.575474
出版商: American Vacuum Society
关键词: TERNARY ALLOY SYSTEMS;ZIRCONIUM ALLOYS;COPPER ALLOYS;COBALT ALLOYS;FABRICATION;ULTRAHIGH VACUUM;PHASE DIAGRAMS
数据来源: AIP
摘要:
An ultrahigh vacuum apparatus is described for the simultaneous condensation of complete ternary alloy systems. Three singly controlled electron beam evaporation sources provide a constant evaporation rate of the different elements. A specially designed rotating mask guarantees a concentration gradient on the substrate according to a ternary phase diagram. The conversion of the actual concentration profile into a standard ternary phase diagram is done by simple computer calculations. They involve corrections for the beam characteristics of the evaporation sources and for the rotating mask. As an example, measurements for the Zr–Cu–Co system are given. The concentration range for the amorphous phase is compared with thermodynamic predictions using Miedema’s parameter.
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