首页   按字顺浏览 期刊浏览 卷期浏览 A new method for the simultaneous condensation of complete ternary alloy systems under ...
A new method for the simultaneous condensation of complete ternary alloy systems under ultrahigh vacuum conditions

 

作者: A. Mehrtens,   M. Moske,   K. Samwer,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  (AIP Available online 1988)
卷期: Volume 6, issue 6  

页码: 3055-3061

 

ISSN:0734-2101

 

年代: 1988

 

DOI:10.1116/1.575474

 

出版商: American Vacuum Society

 

关键词: TERNARY ALLOY SYSTEMS;ZIRCONIUM ALLOYS;COPPER ALLOYS;COBALT ALLOYS;FABRICATION;ULTRAHIGH VACUUM;PHASE DIAGRAMS

 

数据来源: AIP

 

摘要:

An ultrahigh vacuum apparatus is described for the simultaneous condensation of complete ternary alloy systems. Three singly controlled electron beam evaporation sources provide a constant evaporation rate of the different elements. A specially designed rotating mask guarantees a concentration gradient on the substrate according to a ternary phase diagram. The conversion of the actual concentration profile into a standard ternary phase diagram is done by simple computer calculations. They involve corrections for the beam characteristics of the evaporation sources and for the rotating mask. As an example, measurements for the Zr–Cu–Co system are given. The concentration range for the amorphous phase is compared with thermodynamic predictions using Miedema’s parameter.

 

点击下载:  PDF (492KB)



返 回