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Broadband Bragg filter in microfabricated AlGaAs waveguides

 

作者: R. P. Espindola,   M. K. Udo,   D. Y. Chu,   S. L. Wu,   S. T. Ho,   R. C. Tiberio,   P. F. Chapman,   H. Q. Hou,   T. Y. Chang,  

 

期刊: Applied Physics Letters  （AIP Available online 1996）
卷期: Volume 68, issue 2  

页码: 241-243

 

ISSN:0003-6951

 

年代: 1996

 

DOI:10.1063/1.116473

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We report on the fabrication and characterization of broadband Bragg filters in microfabricated AlGaAs waveguides. Electron‐beam lithography and chemically assisted ion‐beam etching were used to fabricate first‐order gratings with 250 nm period. Bragg filters with rejection bandwidth ∼15 nm and centered at ∼1.6 &mgr;m are demonstrated. ©1996 American Institute of Physics.

 

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