首页   按字顺浏览 期刊浏览 卷期浏览 A simulation of electromigration‐induced transgranular slits
A simulation of electromigration‐induced transgranular slits

 

作者: Weiqing Wang,   Z. Suo,   T.‐H. Hao,  

 

期刊: Journal of Applied Physics  (AIP Available online 1996)
卷期: Volume 79, issue 5  

页码: 2394-2403

 

ISSN:0021-8979

 

年代: 1996

 

DOI:10.1063/1.361166

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An on‐chip aluminum interconnect carries an intense electric current at an elevated temperature, motivating atoms to diffuse in the solid state, and inducing voids that may cause an open failure. Recent observations have shown that a void sometimes collapses to a slit running nearly perpendicular to the electric current direction. Such a slit often lies inside a grain rather than along a grain boundary. An earlier calculation showed that diffusion on the void surface, driven by the electric current, can cause a circular void to translate in an infinite, isotropic interconnect. It was suggested recently that this solution may be unstable, and that two forces compete in determining the void stability: surface tension favors a rounded void, and the electric current favors a slit. A linear perturbation analysis, surprisingly, revealed that the translating circular void isstableagainst infinitesimal shape perturbation. Consequently, the slit instability must have resulted from finite imperfections. This article reviews the experimental and theoretical findings, and describes a numerical simulation of finite void shape change. We determine the electric field by a conformal mapping of complex variables, and update the void shape for a time step by a variational method. The simulation shows that a finite void shape imperfection or surface tension anisotropy can cause a void to collapse to a slit. ©1996 American Institute of Physics.

 

点击下载:  PDF (250KB)



返 回