Three‐dimensional boundary‐element method for analyzing nonrotationally symmetric perturbations in electrostatic lenses
作者:
Jiye Ximen,
Dayue Li,
期刊:
Journal of Applied Physics
(AIP Available online 1990)
卷期:
Volume 67,
issue 4
页码: 1643-1649
ISSN:0021-8979
年代: 1990
DOI:10.1063/1.345631
出版商: AIP
数据来源: AIP
摘要:
The three‐dimensional boundary‐element method (3D BEM) has been discussed in some aspects involving the subdivision of boundary elements, the quadrature of surface charge density integrals, and their singularities. The 3D BEM has been applied to the analysis of nonrotationally symmetric perturbations in electrostatic lenses. The perturbations due to machining defects (including elliptical distortions, inclined end faces, misalignments, and their combinations) have been calculated and also the asymmetric aberrations have been computed. A set of computer programs has been developed. The computed perturbation potential distributions have been compared with the theoretical ones.
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