Insitusynchrotron studies of the structural properties of Y‐Ba‐Cu‐O thin films during growth
作者:
J. Q. Zheng,
X. K. Wang,
M. C. Shih,
S. Williams,
J. So,
S. J. Lee,
P. Dutta,
R. P. H. Chang,
J. B. Ketterson,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 58,
issue 20
页码: 2303-2305
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.104906
出版商: AIP
数据来源: AIP
摘要:
We report the first real time,insitusynchrotron x‐ray studies of Y‐Ba‐Cu‐O thin‐film growth on (100) SrTiO3using a miniature, faced‐magnetron sputtering system. A combination of the substrate temperature and the deposition rate determines whether the film grows along thea,c, or multiple axes.
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