Thin film lithium niobate on sapphire for SAW applications
作者:
Kuok-San Ho,
Jian Lin,
Jing Chen,
ThomasA. Rabson,
Robert Higgins,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1995)
卷期:
Volume 11,
issue 1-4
页码: 201-211
ISSN:1058-4587
年代: 1995
DOI:10.1080/10584589508013592
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
Deposition of LiNbO3thin films on R-cut (0112) sapphire by rf magnetron sputtering has been systematically investigated and repeatable epitaxial relationships between LiNbO3thin film and sapphire substrate were observed. As a result, the effect of sputtering parameters on deposition of LiNbO3thin films was determined. Optimal conditions for deposition of high quality (1120), (0112) and (1010) LiNbO3thin films were found. A filter was successfully fabricated by forming interdigital transducers (IDT) on the surface of a (1010) LiNbO3thin film on (0112) sapphire. The frequency response curve was measured, and the results are compared with a theoretical model.
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