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Zinc‐indium‐oxide: A high conductivity transparent conducting oxide

 

作者: Julia M. Phillips,   R. J. Cava,   G. A. Thomas,   S. A. Carter,   J. Kwo,   T. Siegrist,   J. J. Krajewski,   J. H. Marshall,   W. F. Peck,   D. H. Rapkine,  

 

期刊: Applied Physics Letters  (AIP Available online 1995)
卷期: Volume 67, issue 15  

页码: 2246-2248

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.115118

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We report the fabrication and characterization of zinc‐indium‐oxide films with similar electrical conductivity and better transparency in both the visible and infrared compared with indium–tin–oxide, a widely used transparent conductor in many technological applications. Dramatically superior transmission properties in the 1–1.5 &mgr;m range in particular make zinc–indium–oxide attractive for use in infrared devices, where transparent electrodes are required. Resisitivities as low as 400 &mgr;&OHgr; cm result from doping with small quantities of Sn; Al, Ga, and Ge are also effective dopants. Deposition on glass and quartz substrates as amorphous films by pulsed laser deposition and dc reactive sputtering is described. ©1995 American Institute of Physics.

 

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