Zinc‐indium‐oxide: A high conductivity transparent conducting oxide
作者:
Julia M. Phillips,
R. J. Cava,
G. A. Thomas,
S. A. Carter,
J. Kwo,
T. Siegrist,
J. J. Krajewski,
J. H. Marshall,
W. F. Peck,
D. H. Rapkine,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 67,
issue 15
页码: 2246-2248
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.115118
出版商: AIP
数据来源: AIP
摘要:
We report the fabrication and characterization of zinc‐indium‐oxide films with similar electrical conductivity and better transparency in both the visible and infrared compared with indium–tin–oxide, a widely used transparent conductor in many technological applications. Dramatically superior transmission properties in the 1–1.5 &mgr;m range in particular make zinc–indium–oxide attractive for use in infrared devices, where transparent electrodes are required. Resisitivities as low as 400 &mgr;&OHgr; cm result from doping with small quantities of Sn; Al, Ga, and Ge are also effective dopants. Deposition on glass and quartz substrates as amorphous films by pulsed laser deposition and dc reactive sputtering is described. ©1995 American Institute of Physics.
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