首页   按字顺浏览 期刊浏览 卷期浏览 Low energy electron microscopy of nanometer scale phenomena
Low energy electron microscopy of nanometer scale phenomena

 

作者: E. Bauer,   M. Mundschau,   W. Swiech,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1991）
卷期: Volume 9, issue 2  

页码: 403-408

 

ISSN:1071-1023

 

年代: 1991

 

DOI:10.1116/1.585581

 

出版商: American Vacuum Society

 

关键词: ELECTRON MICROSCOPY;METALS;FILMS;GROWTH;DESORPTION;SURFACE STRUCTURE

 

数据来源: AIP

 

摘要:

The physical principles of low energy electron microscopy (LEEM) are discussed. The application of this nonscanning imaging method to the study of surface phenomena on the 10 nm scale is illustrated by examples of the growth and desorption of metal films on metal and semiconductor substrates as well as by phase transitions in these films.

 

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