The dielectric and electrical properties of excimer laser ablated processed paraelectric (Ba0.5, Sr0.5)TiO3, ferroelectric Bi-layered SrBi2(Ta0.5Nb0.5)2O9, and antiferroelectric (PbZrO3) thin films have been investigated. The effect of processing parameters on the microstructure of the films and the functional properties has been presented in detail. Some of the recent studies of stress induced effects, dielectric, hysteresis and ac and dc electrical properties have been highlighted in conjunction with microstructures of the films.